OK, oscillator failure analysis step one: Cleaning residual solder off the underside so it sits flat on the mill table. Then a final cleaning with acetone to get any flux residue off.

I wasn't sure if I could mount it to the mill table without it flying off because it was so small, so I mounted it to a ~1cm copper disk with some crystalbond wax.

This will make it much easier to find if I drop it, and give more area for me to attach to the chuck with double-sided tape.

And mounted up on the mill
Starting to thin down the edges of the lid
OK that's thinned down a bunch let's see if i can get in with a scalpel now...
Starting to go...
Almost there just need to peel the lid off fully

Pretty happy with the results for a surgical decap.

It looks like the quartz crystal sits on top and the oscillator driver is under it. Unfortunately we can't see the oscillator die without destroying the crystal.

Nothing looks obviously damaged, I'll do some higher mag images next.

Composite of three focal planes (upper bond pads/crystal surface, lower bond pads, top of package) on the Labsmore/Mitutoyo system.

The left two pads clearly have connections to the driver IC but aren't very visible with the DOF of this system at the chosen focal planes.

It's interesting that the quartz is a somewhat textured surface, I expected a mirror polish.

Nothing looks obviously broken here. Given the fact that the thing isn't oscillating and the history of ultrasonic cleaning I expected to see the quartz plate come out in multiple fragments (one of the reason I wanted to be so cautious opening it, I didn't want to lose shards of it).

Any ideas on other tests or angles I should do before I try to remove the quartz (likely destroying it in the process) to expose the controller die and see if maybe something is up with the wire bonds?

I don't think I can test electrical connectivity between the quartz and the mounting pads with my current setup, gut feeling is that touching it with any of my existing probe needles would shatter it. Maybe I'll try if I'm going to rip it out or something.

Wire bonds from the controller die to the package, seen through the quartz crystal so pretty blurry.

But they definitely look like second / wedge bonds from gold ball bonding.

Top surface of the quartz crystal. Looks like the gold metallization is super thin, it doesn't appear to be causing any change in the texture. Not sure how it's deposited - lithography of some sort I assume, maybe sputtered through a mask? The etched texture seems uniform through the edge of the gold pattern.

Bottom right terminal with focal plane swept from top surface down to the package pad.

No visually evident damage or cracks here.

Ok let's try and measure the resonator with this crime against metrology
8 dB insertion loss when I touch the needles together. Nothing about this setup is remotely impedance matched. Or calibrated.

S21 of the resonator measured at the gold pads on the substrate as best I could. The noise in the left area is me moving the probe into position, I couldn't position the probes and trigger the sweep with only two hands.

Interestingly it seems to resonate at 20 MHz not 10, I guess there's a divide by 2 somewhere in the output stage?

Oh yay, I thought my wife had gone to bed already but she was still up. Got her to click a few buttons for me and now I have a photo of the measurement setup and a clean VNA sweep with a wider bandwidth.

Sure looks like the resonator is intact.

(some frequency shift from nominal is expected due to the forces of the probes disturbing things etc, plus the VNA is IIRC not wired to my GPSDO yet so it might have a slight drift in the timebase)
OK yeah the controller is definitely what fried. Measuring from VDD to ground I see zero current draw at 3.3V. It should be around 6 mA.
All of this is leading me to suspect a broken bond wire but before I do anything else I want to measure resistance from each pair of pins and confirm whether vdd or ground is the open circuit
Sooo... ALL pins (measured at the little castellated U shapes) measure open circuit to any other.

Anyway, that's multiple pieces of evidence to suggest something catastrophic happened to the controller chip and that the resonator itself is fine.

So I guess I'm at the point where I need to rip off the quartz crystal to see what the controller looks like.

It looks like the tip end of the quartz is sitting on or slightly above that little protrusion on the case, and it's only attached by the two silver epoxy bits. So if I can get in at that end and pry up hopefully it'll snap or peel off at the epoxy bonds.
One final view with the polarizer on before I start removing it.
Getting ready to pop it

I just realized I'm an idiot. Looking back at the original photo I don't think those side castellations I was probing actually connect to the internal pins at all.

Meaning my open circuit measurements aren't valid. Too late.

Anyway the quartz element came out without significant visible damage (so I could hypothetically re epoxy it back in although I'm sure it would have parametric shifts lol)

Here's the controller bondout

And here's the die under the 20x objective.

All of the wire bonds look *intact* which makes me wonder if maybe the problem *was* the epoxy bonding to the quartz shaking loose and not making good contact?

Looks like a 3 metal process, planarized but fairly large feature sizes (I'd ballpark a 350nm class node).

Wasn't sure if the 100x objective would be able to reach with the die so deep in the cavity of the package but it just barely clears.

100x scan running now then will do a 100x with focus stacking.

Found the problem! Need to get a good angle on it with the stereo microscope but there's a failed bond wire.

Here's two of the good bonds.

These are second bonds from a gold ball bonder, which means the wire is being fed through a ceramic capillary needle then pushed down against the bonding surface and ultrasonically vibrated while heat and pressure are applied to weld it in place.

You can see the circular indentation on the pad where the capillary landed, and the flattened, squished part of the gold wire.

Most importantly, using the focal plane as a cue to depth, the bond wire is making good contact with the surface.

@azonenberg Just need a really small soldering iron and rock-steady hand! 🤭
@azonenberg
So many of your deep dives are really educational, like how much more semiconductor actually is in a TXCO compared to a normal crystal.
@azonenberg quite a lot of stuff for a simple oscillator!

@azonenberg Thanks for the thread. Thinning and cutting with a scalpel seems to work much better than I expected.

I expect you will, but it'd be cool to have a few higher resolution pictures of the die.

@azonenberg poke it horizontally where it connects to the die, the epoxy points will shear and you can extract the full blank maybe.
@azonenberg you should make a very wide frequency sweep to catch overtones and parasitics below and above the nominal freq. Thrse could reveal damage, at least by comparison with a known good unit.

@f4grx All of the pins of the package measure open circuit and the output is flatlined.

We're not even reaching the point that it *tries* to oscillate. it's something far more fundamental (pun not intended)

@azonenberg if the unit was sonicated it's possible that invisible internal stresses in the quartz shifted its resonances even if the whole resonator looks undamaged.

Even if the amplifier is the obviously damaged part as you diagnosed, it would be interesting to see the difference in resonator behaviour, for curiosity.

@f4grx @azonenberg

I would be interested if it could be powered up again with the window open and seeing if physical manipulation to the crystal surface would result in amplifier output 🤔

@dianea @f4grx Well seeing as the amplifier shows no power consumption and infinite resistance to ground on all pins, I have no way to turn it on.

And I have no way to see what's wrong with the amplifier unless I take the resonator out.

And I don't expect the quartz to survive the process.

@azonenberg @dianea I suspect quartz is stronger than the electrode bonds, that will be interesting :)
No idea when you plan to do that.
@f4grx @dianea I'm gonna try to get the tip of a #11 scalpel blade under the edge of the quartz at the end furthest from the epoxy then pry up and see what happens. Hopefully it will fracture nicely and come off as a large piece (I expect the quartz to snap not the epoxy but if the epoxy breaks, that would be ideal)
@f4grx @dianea I think I'm ready, I've collected all of the data I can think of that would be useful at this point
@dianea @azonenberg that would be useful if we suspected breakage of the bonds between quartz and amplifier, but all outside connections to the silicon die seems to be open, and the culprit looks like catastrophic failure of the amplifier, eg complete debonding or something like that.

@azonenberg There really needs to be a foot pedal (or voice command) to trigger scopes. I never think about it until it's too late.

So now I google it in another window. I need a 1/4" to BNC adaptor for my keyboard pedal.

"External Input (EXT): A simple momentary footswitch can be connected to the "Ext Trig" BNC input on the back of many Tektronix scopes, allowing a foot press to trigger a sweep."

@azonenberg to get a really good 50% duty cycle I assume?
@recursive I mean it's a TCXO so there's gonna be some trimming and temp sensing involved regardless. There might even be a PLL for all I know.

@azonenberg @recursive probably not a pll, that would be overkill. Slight adjustmemts would mean a fractional synth and inevitable spurs.

trimming is usually capacitive and temp sensing is just a diode somewhere in the capacitive feedback. tcxos are deceptively simple sometimes.

whats the part number of the unit? Cant find it in your recent toots.

@azonenberg can you bodge up a probe and look at s21 on the VNA? The resonator might be fine.
@aholtzma I'm thinking about how I'd get probes down on something so small without damaging it
@aholtzma i don't have like a wafer prober here
@azonenberg what package is that? Guessing not 3225.
@aholtzma It is actually, ECS-TXO-3225MV-100-TR
@azonenberg I’m surprised the resonator fills the package, some manufacturers have been shrinking it down to 2520 size or smaller. Do you still have it? Curious what the thickness was.
@aholtzma i still have it, can attempt to measure
@azonenberg beautiful pics. My guess is sputtering, you dont want to leave photomask residues on the uncoated zones, it would affect frequency and aging.