SPIEFeb 10, 2025
Innovative method to correct surface errors found in tunable electrowetting liquid #microlenses caused by fabrication defects is inexpensive, fully automatic, & easy-to-implement. đź’ˇ Full paper by #SPIE_JOM Editor-in-Chief, available #OpenAccess: www.spiedigitallibra...
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IL PhotonicsDec 24, 2024
In a recently published study at KTH Royal Institute of Technology, various types of #Micro-LensArrays were evaluated in multi-beam #LaserLithography applications. The paper documenting this study is entitled, “Evaluation of #Microlenses for Application in #Nanolithography.” Learn more: https://ilphotonics.com/micro-lens-arrays/
Holo/Or’s Diffractive Lens Arrays Best Choice for Multi-Beam Lithography Applications | IL Photonics

Holo/Or’s diffractive lenses maintained the laser M2 with no measurable added aberrations, significantly better than refractive MLAs.

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