semiconductor folks! I've seen a lot of talking heads repeat the claim that "a helium shortage is bad for chip production", never substantiated with useful information. do any of you know:

  • what is helium actually used in the processes?
  • which specific processes would be affected?
  • how much helium (ballpark) is needed per year?
  • where, if anywhere, a closed cycle is used?
  • what happened to the strategic helium reserve in the US?
neither me nor anybody i've talked to so far (including some industry people) could point at any process steps they know involves helium, and i've no idea where this claim originated

from some discussion and research, it seems like one of the major uses is in ESC/BSG wafer clamp devices (https://csmantech.org/wp-content/acfrcwduploads/field_5e8cddf5ddd10/post_6573/15.3_Characterization_of_Electrostatic_Chuck.pdf) where flow of helium is less than 20 sccm per chuck.

this represents about 2 micrograms of helium per second per chuck, which i'm not too concerned about. there are of course some other applications that may consume more helium

macnamara on bsky is the first person to give a credible and comprehensive primary source for total He usage by a semiconductor facility in this report

Each advanced semiconductor facility consumes approximately 2-4 million cubic feet of helium annually for various manufacturing processes, including ion implantation, chemical vapor deposition, and plasma etching operations.

this is a range of 56000-113000 cubic meters of helium per year, or 155-310 cubic meters per day

Helium Gas Market Size, Share & 2034 Growth Trends Report

The Helium Gas Market size is expected to reach USD 6.2 billion in 2034 registering a CAGR of 5.1. This Helium Gas Market research report highlights market share, competitive analysis, demand dynamics, and future growth.

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one caveat is that this is for an "advanced" facility (I assume they mean EUV); I'm equally interested in what an older node's consumption would be like, since we can live without top-end GPUs but can't live without power MOSFETs

@whitequark UHV systems will typically have a cryopump. This is a closed cycle helium system and although they do break and need to be recharged occasionally it's much less than a cylinder per year.

Sputter systems are a common place to find these

@ldcd yeah basically I'm thinking that anything below "cylinder per week" isn't going to matter in the global scheme of things, I'm trying to figure out where the higher usage comes from
@whitequark yeah I have no idea where that 2-4million cubic feet per year thing is coming from, our fab is pretty advanced (DUV processing etc) and afaik all the tools with helium are closed cycle
@whitequark also the US vents some stupid amount of helium into the air from natural gas production because it's currently not economical to capture it, I don't expect this to be a serious issue

@whitequark I think a large part of the panic we periodically see over semiconductor consumables exists only because analysts and tech executives have convinced themselves that fabs are these super high tech automated facilities, when in fact they are massively labour intensive to operate

They think they're like data centers where you can staff them with like 3 security guards one tech and a few remote hands when in actuality you need a massive team of highly skilled people working in three shifts around the clock