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A Breath of Fresh Air for Chipmaking: Imec's Oxygen Trick Lifts EUV Output by 20%

#Semiconductors #EUVLithography #Chipmaking #TechNews #AUKUS #AusNews

https://thedailyperspective.org/article/2026-03-01-a-breath-of-fresh-air-for-chipmaking-imecs-oxygen-trick-lifts-euv-output-by-20-7dbeafc2

A Breath of Fresh Air for Chipmaking: Imec's Oxygen Trick Lifts EUV Output by 20%

Belgian research hub Imec finds raising oxygen during a key baking step lifts EUV photoresist performance 15–20%, potentially cutting chipmaking costs globally.

The Daily Perspective
Mar 1 at 8:36amThe Daily Perspective