High Frequency Optoelectromechanical Nanocrystalline Silicon Nanobeams
Nano-optoelectromechanics is an emerging field with prospects for efficient and low-power devices for information technology operating at GHz frequency range. To capitalize the prospects, a flexible and up-scalable technology platform has to be established. Nanocrystalline silicon has only recently been used in nano-optoelectromechanical systems with very promising results. Here we investigate further the properties of nanocrystalline silicon relevant for optoelectromechanics and demonstrate operation of nanobeams at several gigahertz frequencies.