Paul PlankenWell, our Perspective paper with the title "Light-induced damage in semiconductor device manufacturing: Present and future challenges", has been published in the Journal of Applied Physics 139, 080901 (2026), doi: https://doi.org/10.1063/5.0308054
One of the interesting aspects of doing research inspired by the challenges of major semiconductor equipment manufacturer, is that the introduction of a paper almost writes itself, because the motivation for doing the work is almost self-explanatory. The above paper, written on invitation, was a real collaborative effort by the authors who each brought their own knowledge and expertise to the table. I am really happy with how well the writing went and how the paper turned out. It is OUR vision of the present future of LID and it may not be complete, but we did our best.......😀 #laser #physics #semiConducteurs
One of the interesting aspects of doing research inspired by the challenges of major semiconductor equipment manufacturer, is that the introduction of a paper almost writes itself, because the motivation for doing the work is almost self-explanatory. The above paper, written on invitation, was a real collaborative effort by the authors who each brought their own knowledge and expertise to the table. I am really happy with how well the writing went and how the paper turned out. It is OUR vision of the present future of LID and it may not be complete, but we did our best.......😀 #laser #physics #semiConducteurs