Introducing refellips: new free/open source software package for analysing #ellipsometry data for #thin #films. Based on refnx (neutron and X-ray reflection analysis), refellips can read lots of commercial ellipsometry data formats and allows corefining ellipsometry, NR and XRR data.
Paper + source code:
https://authors.elsevier.com/sd/article/S2352711022001431
https://doi.org/10.1016/j.softx.2022.101225
https://github.com/refnx/refellips/