Hacker NewsMar 2
Imec demonstrates electrical yield for 20nm lines High NA EUV single patterning — https://www.imec-int.com/en/press/imec-demonstrates-electrical-yield-20nm-pitch-metal-lines-obtained-high-na-euv-single
#HackerNews #Imec #HighNAEUV #20nm #SinglePatterning #ElectricalYield #SemiconductorTechnology
Imec demonstrates electrical yield for 20nm pitch metal lines obtained with High NA EUV single patterning | imec

First electrical tests at 20nm pitch present a next milestone in validating the High NA extreme ultraviolet (EUV) patterning ecosystem

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